Surrey won toss and chose to field first
Tom Kohler-Cadmore scored 62 off 48 balls as Yorkshire totalled 160-5
Surrey finished on 159-7 after needing five to win from the final over
Jamie Overton hit four sixes in his 40 off 21 balls before he was run out
The match was the first T20 meeting between Surrey and Yorkshire
Finals Day takes place at Edgbaston on 16 July
T20 Blast: Yorkshire beat Surrey by one run
That's all from us tonight on a thrilling evening at the Oval.
Yorkshire are the first side confirmed for Finals Day, whilst Surrey will look back on this game with huge disappointment.
We'll be back tomorrow as Birmingham Bears take on Hampshire Hawks at Edgbaston - see you then!
Image source, PA MediaYorkshire win by 1 run
Surrey captain Will Jacks cut a rather more despondent figure as he spoke to Sky:
"Jamie played a brilliant innings to get us ahead of the game", he said, "but Thompson bowled a great over.
"We were very happy at the break, we bowled well and couldn't complain chasing 160.
"We'll be gutted, we won 10 of our first 11 games. But it's all on the day in a Quarter-final, and we weren't quite there."
Yorkshire win by 1 run
Yorkshire skipper David Willey has been talking to Sky Sports after that remarkable finish:
"With three overs to go I thought it was beyond us", he said. "One thing we've lacked at times is a bit of character, so it's great to see two young lads step up like they did at the end.
Jordan Thompson calls himself the big show, so you've got to deliver with that name. [Matt Revis] did very well in the 19th too. We thought 160 was a competitive score, and that we'd have to bowl well.
"It was a great game of cricket, and that's what you want to see.
"I moved here seven years ago to win trophies, and haven't had any, so it'd be a nice way to finish my time here."
Yorkshire win by 1 run
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Kevin Howells
BBC commentator on 5 Live Sports Extra
Quote MessageYou cannot beat this format when it gets to this stage with so much on the line
Nick Compton
Former England Test player on BBC 5 Live Sports Extra
Quote MessageJordan Thompson has absolutely delivered in the biggest game of his career.
Surrey 159-7
Gus Atkinson misses another full-length ball from Jordan Thompson, and Yorkshire are through to finals day!
A scarcely believable final over goes for just three runs, plus the two wickets.
Darren Gough looks like he's gone the distance with Tyson Fury, but has a huge smile on his face!
Surrey 158-7
WOW!! WHAT A CATCH!
Sunil Narine whips a leg-stump half-volley into the leg-side, but Will Fraine runs round from deep square-leg to take a brilliant catch diving forward.
Hat-trick ball, and 3 to win from the last...
Nick Compton
Former England Test player on BBC 5 Live Sports Extra
Quote MessageThis over by Jordan Thompson - the execution has been brilliant.
Surrey 158-6 (Target 161)
Chaos at the Oval!
A slower-ball yorker from Thomson deceives Overton, but Kohler-Cadmore fumbles behind the stumps.
Overton sets off, and TKC recovers to throw down the stumps.
Unbelievable stuff... 3 from 2 needed - Sunil Narine is the new man.
Surrey 158-5 (Target 161)
Another full ball from Thompson, and Laurie Evans takes one down to long-on.
Back to you, Mr Overton.
Surrey 157-5 (Target 161)
Yep, nowhere near the bat. On we go.
A yorker speared in at leg stump just brings one...
Surrey 156-5
Jordan Thompson to bowl the last...
A superb bouncer whistles past Jamie Overton's head, and Yorkshire review...
Out of hope more than anything else, I feel.
Surrey 156-5 (Target 161)
Image source, PA MediaBrilliant from Matt Revis, who goes for just two from the first five balls.
However, he just misses his length with the final ball, and it allows Laurie Evans to smear a six down the ground.
Five needed from the last.
Surrey 148-5 (Target 161)
Two singles end the over, which leaves 13 needed from the last two overs.
Yorkshire need something very special now.
Nick Compton
Former England Test player on BBC 5 Live Sports Extra
Quote MessageJamie Overton's in serious form. There may be brawn, but there's also brains. He's really come on as a batter and is a huge asset for English cricket.
Surrey 146-5
Laurie Evans belts Jordan Thompson's first ball for four down the ground.
A questionable wide decision follows, before Jamie Overton caresses a gorgeous shot over long-off for six.
Unbelievable timing from the big man - he has 37 from 15, and is guiding Surrey to victory here.
Surrey 132-5 (Target 161)
It's all going Surrey's way at the minute - Jamie Overton throws the kitchen sink at a full, wide delivery, and gets a thick outside edge over third man for four.
29 needed from the last three overs... How're your nerves?
Surrey 125-5
Laurie Evans gets in on the act this time, swinging David WIlley over the leg-side boundary.
Another drop in the crowd is then followed by a drop from Jonny Tattersall.
He does the hard work to get there, but shells it as he hits the ground - big moment.
Surrey 117-5 (Target 161)
A much better finish from Revis - he ditches the half-trackers, and bowls two yorkers that Overton can only dig out for dots.