Surrey won toss and chose to field first
Tom Kohler-Cadmore scored 62 off 48 balls as Yorkshire totalled 160-5
Surrey finished on 159-7 after needing five to win from the final over
Jamie Overton hit four sixes in his 40 off 21 balls before he was run out
The match was the first T20 meeting between Surrey and Yorkshire
Finals Day takes place at Edgbaston on 16 July
Surrey 5-1 (Target 161)
Matt Revis shares new-ball duties, and starts well with just a single from his first two deliveries.
Tom Curran, not fit to bowl, is out at number three, and has no answer to an absolute beauty from Revis. Nips back off the seam and flies over the top of the stumps.
Just three off the over. A nervy start to the chase by Surrey.
Surrey 2-1 (Target 161)
Image source, PA MediaAlmost the perfect start for the Vikings - Will Jacks slices his first ball to backward point, but Jonny Tattersall cannot cling on one-handed. It would've been a great catch...
Gone this time though! Another miscued shot across the line flies to Matthew Revis at third-man, and he makes no mistake.
Nick Compton
Former England Test player on BBC 5 Live Sports Extra
Quote MessageThis game is finely poised I would say - 161 needed.
Surrey 0-0 (Target 161)
Stand-in skipper Will Jacks and Rory Burns are out in the middle for Surrey.
David Willey has the new ball for Yorkshire...
Anyone remember the 'creamy old England' commentators' sketch on A Bit of Fry and Laurie? Hilarious.
He's not wrong about the need to attract more people to watch live cricket.
Stephen Fry takes up his position as MCC president on 1 October, and tells the BBC why opening up cricket to everyone will be at the top of his agenda.
Read MoreJust a quick reminder of the other three quarter-finals, while we wait for Surrey's chase.
Thursday
Edgbaston: Birmingham Bears v Hampshire Hawks (18:30 start)
Friday
Old Trafford: Lancashire Lightning v Essex Eagles (18:30)
Saturday
Taunton: Somerset v Derbyshire Falcons (19:00)
Big news from the earlier in the day. Moeen has agreed a primarily white-ball deal with Warwickshire/Birmingham Bears.
England all-rounder Moeen Ali is to leave Worcestershire at the end of the season to return to Warwickshire on a primarily white-ball deal.
Read MoreSo work to do for Surrey having looked very cosy for 16 overs.
But 52 runs have come from the last four.
That progress perhaps suggests Yorkshire have left a few out there maybe.
Yorkshire's bowlers have also been panned in their last two games.
Bears took them for 238 before Leicestershire had 211 off them.
Yorkshire 160-5
Nick Compton
Former England batsman on BBC 5 Live Sports Extra
Quote MessageYorkshire have got a score. It's about par, they've done well having lost a few senior players. Tom Kohler-Cadmore was impressive on a wicket that was difficult to score runs, and Will Fraine's cameo will have them excited going into the break. You never know...
Yorkshire 160-5
So will that be enough for Yorkshire?
Will Fraine has hauled them back into the match with a fine late hand.
He finishes with 32 not out from 14 balls.
Tom Kohler-Cadmore set things up with 62 from 48.
Slower ball outside off is dragged wide of deep midwicket for two.
But then length and whacked down the ground for six.
Very sweet strike again from Will Fraine, this time into the pavilion.
Worrall finds a yorker final ball but Fraine manages to squirt it wide of long-on for six.
Yorkshire do reach 160.
Yorkshire 150-5
Yorker first up just past leg stump, Jordan Thompson had shuffled across so Worrall gets away with it.
Another good full delivery, only squeezed out to long-on for one.
Then just misses his length and gets swung to the extra-cover fence, nice strike from Will Fraine.
Yorkshire 145-5
Dan Worrall to round off the innings.
Can Yorkshire find 160?
Yorkshire 145-5
Full and wide first up to Jordan Thompson and he can only jam it down the ground for one.
Will Fraine dancing on the crease then squirts a drive just wide of extra-cover.
A swing from Thompson final ball and he skies it to point.
Oh hold on...has Atkinson overstepped?
He has! Man alive that is a tight call from the third umpire - not convinced by that at all.
Just a single from the free hit.
Yorkshire 140-5
Nick Compton
Former England batsman on BBC 5 Live Sports Extra
Quote MessageJust tried to help it on it's way, he's timed the ball so well tonight, but just helps this one through to Ollie Pope.
Yorkshire 140-5
Gus Atkinson to finish from the Vauxhall End.
A yorker is squeezed out through square leg by Shadab Khan and it beats long leg and deep midwicket to the fence.
But he then gloves a pull down the leg side and an easy catch for Ollie Pope.
Nine balls left.
Yorkshire 134-4
Dan Worrall returns.
And Will Fraine picks him up and over square leg for a large six. Lovely strike.
Then he slices one straight through short-third man. That was travelling but probably should have been saved.
Ooo, four more, a crunching cover drive.
16 from the over. Much better from Yorkshire.
Can get to 160?
Yorkshire 118-4
Image source, PA MediaShadab squeezes one through point for two.
And lifts him very sweetly inside long-off for a one-bounce four.
10 from Sunil Narine's last and he finishes with 1-26.
Yorkshire 108-4
Six first ball but an outstanding over from Gus Atkinson as Ollie Pope stretches to claim a steepling bumper last delivery.
Yorkshire 108-4
Poor start from Gus Atkinson, back for his third over.
A leg stump half-volley is whipped wide of long leg by Shadab.
But a good comeback as a pace-off delivery is swung to long-on by Tom Kohler-Cadmore.
The set man goes.
Solid low catch from Jamie Overton running in.